Viennaps

What's Changed
* Include visibility calculation in the directional etch model
* Multi-particle model: add material-dependent sticking
* Add Faraday cage etching model
* SF6O2 model update
* Add units
* Add coverage metric
* Update examples
* Implement advanced parameters for advection and ray tracing
* Add Python stub files to the package
* Add hull mesh extraction
* Refactor basic geometry builders

**Full Changelog**: https://github.com/ViennaTools/ViennaPS/compare/v3.2.0...v3.3.0

What's Changed
* Python wrapper fixes
* Added MultiParticle process
* Added option in Domain to remove Level Sets or materials
* Use default ViennaRay particles

**Full Changelog**: https://github.com/ViennaTools/ViennaPS/compare/v3.1.0...v3.2.0

What's Changed
* Update Core, enable automatic publishing of Python packages
* Add 2-particle TEOS PE-CVD model
* Enable material-specific rates in SingleParticleProcess
* Add Bosch process example and SF6 etching model


**Full Changelog**: https://github.com/ViennaTools/ViennaPS/compare/v3.0.1...v3.1.0

What's Changed
* Added the ViennaCore library for common functionalities
* Changed the fixed class and function prefix 'ps' to a namespace 'viennaps'.
* Extracted the cell set functionalities to a separate library [ViennaCS](https://github.com/ViennaTools/ViennaCS)
* Some cell set examples were moved to ViennaCS
* Updated the ALP example

What's Changed

* Major CMake overhaul
* Add single-pass flux calculation
* Add fin tapering option
* Process model improvements


**Full Changelog**: https://github.com/ViennaTools/ViennaPS/compare/1.3.1...2.0.0

New in this release:

- Oxide regrowth model now also works in 3D
- Added new constructors to _psProcess_ to quickly run simple models
- Fixed the deep copy function for a _psDomain_.
- Tilting of the source direction when using ray tracing is now possible! (an example will follow soon)
- Added small unit tests to assert the correct functionality of the library
- Added a generalized anisotropic process model to enable the modeling of selective epitaxial growth. A SEG example has been added.
- New helper functions in psDomain to save volume and level set meshes: _saveVolumeMesh()_, _saveLevelSetMesh()_.

Breaking Changes:
- Changed _psProcess_ member function to enable flux smoothing. Removed function _setFluxSmoothing(bool)_ and added the functions: _enableFluxSmoothing()_ and _disableFluxSmoothing()_. Flux smoothing is enabled by default.
- The name conventions of the folder and example have changed to all begin with a lowercase letter. Also, all models now also contain the prefix 'ps'
- The WetEtching model has been removed. Instead, a generalized anisotropic process model has been added. The example has been updated accordingly.
- The psDomain member function _printSurface()_ has been renamed to _saveSurfaceMesh()_.

*Note*: This release uses a legacy branch of ViennaLS. This is a temporary measure, while we rework and enhance the entire build system of ViennaLS and ViennaPS. The new and improved build system will be released with a new version of the library.